▎ 摘　　要

NOVELTY - The device (1) has a top roll chamber (100) that is arranged for supplying the rolled catalyst metal film to unloading bobbin to deposition chamber (200). The deposition chamber is connected to top roll chamber. The graphene is deposited in the catalyst metal film. The radar is fixed with chamber case (101). The bottom roll chamber (300) where the catalyst metal film is rolled in the loading bobbin is connected to the deposition chamber. The unloading bobbin is settled in rotation roller mounted on the top roll chamber inner side, to unload the catalyst metal film. USE - Graphene film manufacturing device for forming transparent display or flexible display. ADVANTAGE - The degree of vacuum is maintained within chamber while preventing the movement of the airstream between each chamber and improving the process stability. The reliability of the graphene manufacture is secured. The damage of the catalyst metal film in which the graphene is deposited can be prevented. The chamber is supported to the elastic element so that the load is reduced while preventing the expansion of the volume according to the thermal change, including deformation or the damage of the chamber. The installation is facilitated close to the catalyst metal film at the same time while forming the heater of deposition chamber into zigzag type in-plane heating plate and raising the thermal efficiency. The shield plate is formed within the deposition chamber so as to prevent heat from being radiated to the outside and heat is reflected in the inside while enhancing the deposit efficiency of the graphene in the catalyst metal film. The maintenance and repair within the chamber are facilitated when the door is formed in front or the rearward of the chamber. DETAILED DESCRIPTION - The device has first guide roller that is positioned at the front of the unloading bobbin and guiding catalyst metal film supplied from the unloading bobbin. The vacuum pump is arranged such that catalyst metal film is supplied to the first guide roller while positioned at the front of first guide roller mounted on the outside of the top roll chamber. The feed roller is arranged for supplying to deposition chamber while maintaining fixed tension and for sustaining the degree of vacuum of the top roll chamber inner side. The cooling water is ejected to cool the catalyst metal film. The deposition chamber is connected to the top roll chamber in the lower portion of top roll chamber. The heater (250) is mounted on the deposition chamber inboard, for depositing the graphene on the catalyst metal film in front and rear side of the catalyst metal film supplied to the top roll chamber. The shield plate (230a) is mounted on inner side of deposition chamber. The construction progress gas supply pipe is mounted on the outside of the deposition chamber, for injecting the process gas to the inner side of the deposition chamber. The heater is formed with the zigzag type heating plateformed with tungsten, graphite, and the silicon carbide or the carbon nanotube. The stainless plate is laminated to the fixed interval in the rear surface of molybdenum plate. The film adhesion rollers are deposited while winding roller for reeling the catalyst metal film to fixed tension in the loading bobbin is fixed. The door (130) is mounted in one side of bottom roll chamber and top roll chamber. DESCRIPTION OF DRAWING(S) - The drawing shows a perspective view of the graphene film manufacturing device. Graphene film manufacturing device (1) Top roll chamber (100) Chamber case (101) Door (130) Deposition chamber (200) Shield plate (230a) Heater (250) Bottom roll chamber (300)