▎ 摘　　要

NOVELTY - Semiconductor epitaxial structure based on double-layer metal micro-nano and graphene complex structure comprises a substrate (1), an aluminum nitride layer (2), an N-aluminum gallium nitride layer (3), an aluminum gallium nitride multi-quantum well (4), a P-aluminum gallium nitride electron blocking layer (5), a P-aluminum gallium nitride layer, aluminum metal micro-nano structure layer, P-gallium nitride layer, aluminum metal periodic structure layer and graphene layer, where the aluminum metal micro-nano structure is aluminum metal nano-particle or aluminum metal nano-structure array. USE - The semiconductor epitaxial structure based on double-layer metal micro-nano and graphene complex structure is used in semiconductor optoelectronic device. ADVANTAGE - In the semiconductor epitaxial structure, an aluminum metal micro-nano structure layer is prepared under the P-gallium nitride layer, and an aluminum metal periodic structure layer and a graphene layer complex micro-nano structure are prepared above the P-gallium nitride layer, using the resonance coupling effect between the surface plasmon and the excited state, it solves the problem that the plasmon cannot match the energy of the excited state caused by insufficient skin depth, and greatly enhances the light extraction efficiency. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (1) preparation method of semiconductor epitaxial structure based on double-layer metal micro-nano and graphene complex structure; and (2) deep ultraviolet light-emitting diode (LED) device structure. DESCRIPTION OF DRAWING(S) - The drawing shows a structure schematic diagram of the semiconductor epitaxial structure based on double-layer metal micro-nano and graphene complex structure. 1Substrate 2Aluminum nitride layer 3N-aluminum gallium nitride layer 4Aluminum gallium nitride multi-quantum well 5P-aluminum gallium nitride electron blocking layer 6P-aluminum gallium nitride layer 7Aluminum metal micro-nano structure layer 8P-gallium nitride layer 9Aluminum metal periodic structure layer 10Graphene layer