▎ 摘 要
NOVELTY - Preparing a graphene biomimetic photodetector based on temperature regulation property involves providing a graphene and microheater platform and transferring the graphene to the microheater platform, annealing the structure in a chemical vapor deposition reactor, modifying the surface of the graphene after annealing using a reagent to form an active film having a reactive group on the surface of the graphene, forming a photoreceptor protein on the surface of the active film by binding the photoreceptor protein to a reactive group of the active film to form a covalent bond. USE - Method used for preparing graphene biomimetic photodetector based on temperature regulation property. ADVANTAGE - The method enables to adopt photoreceptor protein to realize wavelength selectivity and increase light absorption rate, reduce the influence of the substrate on the graphene performance, adjust the operating temperature by heating the voltage to adjust the photocarrier mobility and concentration to improve the performance of the photodetector device. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) a method for preparing the micro heater platform, which involves providing a substrate and forming a composite film on the substrate, where the composite film is used to define a heated film region and a support beam region, forming a heating metal layer on the composite film, patterning the heating metal layer to obtain a resistance device, where the resistance device icludes a heating resistance wire, a first power supply lead, a first power supply electrode, where the heating resistor wire is located in the heating film area, forming an insulating layer on the heated metal layer, forming a test metal layer on the insulating layer, patterning the test metal layer to obtain an electrode device, where the electrode device includes a test electrode, a second power supply lead, a second power supply electrode, the test electrode is disposed corresponding to the heating resistor wire, the test electrode is covered by the graphene, forming a film release window in the structure and exposing the substrate, etching the substrate through the film release window to form a heat insulating chamber to release the heated film region and the support beam region; and (2) a graphene biomimetic photodetector based on temperature regulation properties, which comprises a microheater platform, graphene on the microheater platform, an active film formed on a surface of the graphene and a photoreceptor protein formed on the active film.