▎ 摘　　要

NOVELTY - The pressure sensor has an optical waveguide (110) that is provided inside a lower substrate (100). A graphene layer (120) is provided on the lower substrate. An upper substrate (160) is provided on the graphene layer. Several spacers (140) are provided between the lower substrate and the upper substrate. A top surface (111) of the optical waveguide is coplanar with a top surface of the lower substrate. The graphene layer is in contact with the top surface of the lower substrate and the top surface of the optical waveguide. A refractive index of the upper substrate is greater than or equal to a refractive index of the optical waveguide. USE - Optical type pressure sensor. ADVANTAGE - The protection film can protect the graphene layer, thus preventing the structural deformation of the graphene layer. The interaction strength between the optical signal and the graphene layer can be increased by providing multiple light emission channels. The pressure sensor can detect the change in the intensity of the optical signal with respect to even a small change in pressure. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the pressure sensor. Lower substrate (100) Optical waveguide (110) Top surface (111) Graphene layer (120) Spacers (140) Upper substrate (160)