• 专利标题:   Nanopillar LED chip comprises insulating substrate, graphene layer, and nano-pillar LEDs containing n-gallium nitride layer, spin-on-glass fillers, indium tin oxide transparent conductive layer, and p/n electrode.
  • 专利号:   CN111326610-A
  • 发明人:   LIU Z, REN F, ZHANG S, YIN Y, WANG Y, LIANG M, YI X, YUAN G, WANG J, LI J
  • 专利权人:   INST SEMICONDUCTORS CHINESE ACAD SCI
  • 国际专利分类:   B82Y010/00, B82Y030/00, B82Y040/00, H01L033/00, H01L033/40
  • 专利详细信息:   CN111326610-A 23 Jun 2020 H01L-033/00 202063 Pages: 8 Chinese
  • 申请详细信息:   CN111326610-A CN11539285 14 Dec 2018
  • 优先权号:   CN11539285

▎ 摘  要

NOVELTY - A nanopillar LED chip comprises an insulating substrate, a graphene layer grown on the insulating substrate, and nano-pillar LEDs grown on the graphene layer at intervals. The nano-pillar LED comprises an n-gallium nitride layer, a multi-quantum well light emitting layer and a p-gallium nitride layer, spin-on-glass (SOG) fillers filled in the interval and surrounding portions of the nano-pillar LEDs and isolating the nano-pillar LEDs and avoids short circuit, an indium tin oxide transparent conductive layer connected to the p-gallium nitride layer of the nano-pillar LED and the SOG filler to achieve current expansion, and p/n electrode for preparation of nano-pillar LED chips on an insulating substrate. USE - Nanopillar LED chip. ADVANTAGE - The LED chip efficiently uses a graphene buffer layer to cover the n-electrode area before the growth of the nano-pillar through a photolithography process on the insulating substrate and exposes the graphene layer of the n-electrode region to be a current spreading layer of the n-electrode and realizes the extraction of the nano-pillar n-electrode on the insulating substrate after the growth. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for manufacture of nanopillar LED chip.