• 专利标题:   Probe for probe card, has graphene layer that is formed on outer surface of probe main portion.
  • 专利号:   CN108957057-A, TW629485-B1, TW201901156-A
  • 发明人:   SU W, SU W J
  • 专利权人:   CHUNGHWA PRECISION TEST TECH CO LTD, CHUNGHWA PRECISION TEST TECH CO LTD
  • 国际专利分类:   G01R001/067
  • 专利详细信息:   CN108957057-A 07 Dec 2018 G01R-001/067 201913 Pages: 12 Chinese
  • 申请详细信息:   CN108957057-A CN11042258 30 Oct 2017
  • 优先权号:   TW116938

▎ 摘  要

NOVELTY - The probe (10) has a graphene layer (120) that is formed on an outer surface of a probe main portion (110). The graphene layer is less than 100 nm. The thickness of the graphene layer is between 0.3 nm and 4 nm. A metal protective layer is formed outside the graphene layer. The material of the metal protective layer comprises gold. The thickness of the metal protective layer is between 0.1 mu m and 1 mu m. USE - Probe for probe card. ADVANTAGE - By forming a graphene layer on the surface of the probe, the effect of improving the heat dissipation capability, current resistance and mechanical properties of the entire probe can be achieved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a probe for probe card manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the probe for probe card. (Drawing includes non-English language text) Probe (10) Head section (11) Tail section (12) Probe main portion (110) Graphene layer (120)