• 专利标题:   Growing large mismatched indium gallium arsenide material involves covering layers of graphene on mismatched substrate, placing in growth chamber of gaseous source molecular beam epitaxy system, introducing arsine and pyrolyzing.
  • 专利号:   CN110205673-A
  • 发明人:   GU Y, WANG H, ZHANG Y, SHAO X, LI X, GONG H
  • 专利权人:   SHANGHAI TECH PHYSICS INST CHINESE ACAD
  • 国际专利分类:   C30B025/02, C30B025/18, C30B029/40, H01L021/02
  • 专利详细信息:   CN110205673-A 06 Sep 2019 C30B-025/18 201976 Pages: 6 Chinese
  • 申请详细信息:   CN110205673-A CN10411829 17 May 2019
  • 优先权号:   CN10411829

▎ 摘  要

NOVELTY - Growing large mismatched indium gallium arsenide material involves covering 3-30 layers of graphene by growth or transfer on mismatched substrate, placing the substrate in growth chamber of gaseous source molecular beam epitaxy system, heating at 700-1000 degrees C, introducing arsine into the growth chamber, pyrolyzing at 900-1100 degrees C under pressure of 1x 10-5-5x 10-5 Torr, maintaining the temperature for 30 minutes, increasing the temperature at 500-550 degrees C, opening indium and gallium beam source furnace shutter and growing. USE - The method is useful for growing large mismatched indium gallium arsenide material. ADVANTAGE - The method is capable of growing large mismatched indium gallium arsenide material with excellent versatility.