• 专利标题:   Sensor module for gas sensor, has dielectric layers that are provided at constant interval from graphene layer in normal direction of graphene layer on each of first surface side and second surface side of graphene layer.
  • 专利号:   JP2023070346-A
  • 发明人:   MATSUMIYA Y
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   G01J001/02, G01N021/3504, H01L031/0232
  • 专利详细信息:   JP2023070346-A 19 May 2023 G01N-021/3504 202345 Pages: 18 Japanese
  • 申请详细信息:   JP2023070346-A JP182454 09 Nov 2021
  • 优先权号:   JP182454

▎ 摘  要

NOVELTY - The sensor module (10) has the dielectric layers (11) that are provided at a constant interval from a graphene layer (15) in a normal direction of the graphene layer on each of a first surface side (151) and a second surface side (152) of the graphene layer in which a thickness of each of the dielectric layers is wavelength of incident light divided and multiplied by 4, and a thickness of a gap (12) is divided by 4 when a wavelength of light passing through the dielectric layer and the graphene layer is wavelength of the incident light and a refractive index of the dielectric layer at the wavelength is n. USE - Sensor module for gas sensor (claimed) used in photoelectronic device such as light-receiving element and infrared sensor. ADVANTAGE - The sensor module comprises a graphene layer and a dielectric layer that is provided in each surface side of the graphene layer, and thus improving the electrical noise resistance and sensitivity of the sensor module. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of the gas sensor. (Drawing includes non-English language text) 10Sensor module 11Dielectric layer 12Gap 15Graphene layer 151First surface side 152Second surface side