▎ 摘 要
NOVELTY - Graphene manufacturing apparatus comprises: a gas supplying unit (10) for supplying a gas comprising carbon; a gas heating unit (20) for heating the supplied gas; a deposition chamber (50) in which a substrate (90) having a catalyst layer is disposed; and an inlet pipe (40) for supplying the gas of the gas heating unit into the deposition chamber. USE - Used as graphene manufacturing apparatus. ADVANTAGE - The apparatus manufactures large-size stable graphene economically and freely controls processing temperatures and energy thus making gas and substrate heating units separate from each other and reducing time and energy taken to synthesize graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for manufacturing graphene, comprising: moving the substrate to deposition chamber; supplying the gas to gas chamber separately disposed from the deposition chamber; heating the gas in the gas chamber; and introducing the heated gas into the deposition chamber, and synthesizing graphene on the substrate. DESCRIPTION OF DRAWING(S) - The figure is a block diagram illustrating the graphene manufacturing apparatus. Gas supplying unit (10) Gas heating unit (20) Inlet pipe (40) Deposition chamber (50) Substrate (90)