▎ 摘　　要

NOVELTY - An apparatus consists of plasma generator, a treatment chamber connected to the plasma generator, a substrate holder positioned to hold a substrate for electron microscopy, preferably cryogenic electron microscopy and comprising graphene or graphene oxide layer in the treatment chamber and having a mounting area provided to have a substrate mounted, a shutter movable between an open position, in which the mounting area of the substrate holder is exposed to the treatment chamber, and a closed position, in which the mounting area of the substrate holder is concealed, an injector for injecting functionalizing compound into the treatment chamber, and helium source for supplying helium to the plasma generator. USE - Apparatus used for functionalizing graphene or graphene oxide (claimed). DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) cryogenic electron microscopy specimen support, which comprises a metal foil substrate, and a layer of functionalized graphene or graphene oxide on the substrate comprising multiple different functionalizations; (2) functionalizing of graphene or graphene oxide on a substrate, which involves (a) exposing a substrate comprising a layer of graphene or graphene oxide to a plasma comprising helium and at least one functionalizing compound; and (3) method of multiply functionalizing graphene or graphene oxide on a substrate, which involves (A) masking an area of a substrate comprising layer of graphene or graphene oxide, (B) exposing the unmasked area to a plasma comprising helium and at least one functionalizing compound to form a functionalized zone, (C) unmasking the substrate, (D) repeating process (A) to (C) using a different functionalizing compound to form a substrate comprising layer of graphene with multiple zones each having different functionalization.