▎ 摘　　要

NOVELTY - Silicon carbon anode material comprises substrate and nano silicon deposited on the surface of substrate, where the substrate is a carbon material. The nano-silicon is deposited on the surface of the substrate through a plasma-enhanced chemical vapor deposition process, during the plasma enhanced chemical vapor deposition process. The substrate is fluidized in the deposition zone. The plasma enhanced chemical vapor deposition process is performed in a fluidized plasma vapor deposition furnace. The fluidized plasma vapor deposition furnace is provided with a cathode and a anode plate and a deposition area is formed between the cathode and the anode plate. The anode has a vibration conveying function and substrate fluidizes in the deposition area under the vibration of the anode. USE - The silicon carbon anode material is useful for lithium ion batteries. ADVANTAGE - The silicon carbon anode material: ensures the nano-silicon is uniformly and firmly distributed on carbon material through the fluidized flow of the substrate during the deposition process; solves the problem of nano-silicon is clumped due to dissociation and can effectively improve the battery performance. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (1) preparing silicon carbon anode material comprising (a) placing substrate into a fluidized plasma vapor deposition furnace and vacuuming the deposition furnace, (b) heating the deposition furnace, and making substrate fluidize in deposition area under the vibration of the anode plate, (c) pouring diluent gas into deposition furnace, turning on plasma generator and adding silicon source gas to deposit nano-silicon on surface of substrate to obtain product A and (d) sieving and filtering product A to obtain product A1 and coating product A1; (2) lithium-ion battery silicon-carbon anode material prepared by mixing or blending lithium-ion battery silicon-carbon anode materials B1, B2 and B3; and (3) device for preparing silicon carbon anode materials comprising fluidized plasma vapor deposition furnace. The deposition furnace body is provided with a material inlet and a material outlet. The cathode and anode are arranged inside the furnace body. The number of cathode is more than one. The each cathode can be individually connected to working gas and plasma generator. The cathode is set above the anode to maintain working distance with anode. A plasma vapor deposition zone is provided between cathode and anode. A feed plate and discharge plate respectively connected between the anode, feed port and discharge port. A vibration device is connected to the feed plate, the discharge plate and the anode with vibration conveying function. An electric heating element is provided under the anode.