▎ 摘　　要

NOVELTY - The chip has a silicon nitride vertical light coupling grating provided with a signal input port. Mach-Zehnder interferometer is fixed between two multi-mode interference couplers. One of the multi-mode interference couplers is fixed to a first silicon nitride optical waveguide device part to process an optical signal and connected to a graphene detector by a second silicon nitride optical waveguide device part. The graphene detector performs photoelectric conversion process of the optical signal. A graphene film is fixed at a bottom part of a top gate. USE - Silicon nitride optical waveguide device and graphene detector integrated chip. ADVANTAGE - The chip is simple in structure. The chip realizes multiple reconfigurable optical signal processing functions by designing different structures of the silicon nitride optical waveguide device parts, ensures wide light absorption wavelength range and wide electrical bandwidth of the graphene detector and carries out on-chip monolithic integration of a optical signal processing function unit. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a silicon nitride optical waveguide device and graphene detector integrated chip manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of a silicon nitride optical waveguide device and graphene detector integrated chip. '(Drawing includes non-English language text)'