▎ 摘　　要

NOVELTY - Preparation of an atom scale graphene groove comprises placing or suspending graphene on a high temperature resistant substrate; depositing single metal atoms or metal cluster with scale of less than 10 nm and formed by several atoms on the graphene surface; and etching graphene at 400-800 degrees C and under argon (Ar)/hydrogen gas (H2) atmosphere, naturally cooling to room temperature, taking out, vacuum-drying, and storing in a clean environment. USE - Method for the preparation of an atom scale graphene groove used for micro-structure, physical microelectronics, and nano-electronics field. ADVANTAGE - The etched graphene groove has atom scale smooth edge with chirality, thus reducing influence of edge defect for graphene performance.