▎ 摘　　要

NOVELTY - The apparatus (100) has a power supply (102) including a negative terminal (112) and a positive terminal (114). A container (104) contains an electrolyte (115). A cathode (108) is coupled to the container, and fluidly communicates with the electrolyte. The cathode includes a portion electrically connected to the negative terminal. An anode (110) is provided with a portion electrically connected to the positive terminal, and includes a graphene layer (118) and a metal substrate layer (120) that is etched from the graphene layer in response to the current flowing through the anode. USE - Apparatus for electrochemical or electroplating etching of metal substrates i.e. copper foils, from graphene for an electronic device application and a semiconductor application. ADVANTAGE - The graphene layer of the anode is electrically coupled to a metal plate and configured to receive current and maintain sustainably increased current throughput through a copper film such that overall etching time of the copper film can be reduced, so that large scale productions of graphene can be achieved. The current output from the power supply is kept low such that the current density does not reach a level that damages the graphene layer, thus preventing damage of the graphene layer. The apparatus provides a new-graphene layer to be formed on a new-metal substrate layer of the cathode such that the metal substrate layer can be recycled and composition of the electrolyte solution can be maintained, thus providing an environmentally-friendly solution for disposing the electrolyte solution. DETAILED DESCRIPTION - The metal substrate layer is made of copper. The electrolyte is a solution of sulfuric acid, a solution of copper chloride and electrolyte metal. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of an electrochemical or electroplating etching apparatus. Electrochemical or electroplating etching apparatus (100) Power supply (102) Container (104) Cathode (108) Anode (110) Negative terminal (112) Positive terminal (114) Electrolyte (115) Graphene layer (118) Metal substrate layer (120)