• 专利标题:   Method for manufacturing ultraviolet light LED chip, involves grinding substrate on back surface of ultraviolet LED chip to transfer graphene film onto substrate on back surface of ultraviolet LED chip.
  • 专利号:   CN110137336-A
  • 发明人:   HAO H
  • 专利权人:   UNIV SHANGHAI ENG TECHNOLOGY
  • 国际专利分类:   H01L033/40, H01L033/64
  • 专利详细信息:   CN110137336-A 16 Aug 2019 H01L-033/64 201978 Pages: 10 Chinese
  • 申请详细信息:   CN110137336-A CN10523119 17 Jun 2019
  • 优先权号:   CN10523119

▎ 摘  要

NOVELTY - The method involves performing photolithography and etching on a ultraviolet LED chip (1) to expose portion of a N-AlGaN structure (10). A single-layer or multi-layer graphene film is prepared, and a graphene film (40) is transferred to a surface of the ultraviolet LED chip. The photolithography and etching of the ultraviolet LED chip are performed to retain the graphene film in a specific region on the surface of the ultraviolet LED chip, and the graphene film is removed in other regions. An electron beam evaporation device is used to vaporize the open area of the surface of the ultraviolet light LED chip with a P electrode and an N electrode. A substrate (70) is grind on a back surface of the ultraviolet LED chip to transfer the graphene film onto the substrate on the back surface of the ultraviolet LED chip. USE - Method for manufacturing ultraviolet light LED chip (claimed). ADVANTAGE - The reliability of the chip is improved. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the ultraviolet light LED chip manufacturing method formed in step four ultraviolet light LED chip. (Drawing includes non-English language text) Ultraviolet LED chip (1) N-AlGaN structure (10) Quantum well (20) Graphene film (40) Substrate (70)