▎ 摘　　要

NOVELTY - The sensor has a flexible pressure sensor formed on a same substrate material, where the flexible pressure sensor is an integrated structure. An ablation substrate material surface is formed on a graphene upper electrode and an upper electrode plate of a capacitive pressure sensor by laser carving. A middle residual layer of an original substrate material is formed with a middle dielectric layer material of the capacitive pressure sensor under the laser engraving ablation substrate material surface form a lower electrode graphene as a lower electrode plate of the capacitive pressure sensor by adjusting the laser engraving parameter and the substrate material after processing the lower graphene electrode, where upper and lower electrode surface are packaged by an elastomer for packaging the electrode graphene. USE - Double-sided engraving laser induced graphene based flexible pressure sensor for electronic device touch screen, industrial control environment and mechanical measuring system. ADVANTAGE - The sensor reduces the cost and the preparation period, and can form the electrode-dielectric layer-electrode on the same substrate material by adjusting and controlling the laser processing of the specific proportion, and ensures the sensitivity, stability and working range, and simplifies the complex preparation process and excellent selection. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a double-sided engraving laser induced graphene based flexible pressure sensor. (Drawing includes non-English language text).