• 专利标题:   Graphene-based thin-film photoelectric detector for use in low light detection and ultrafast light pulse detection, comprises silicon-silicon dioxide substrate, graphene light absorbing material, gold source and drain electrodes.
  • 专利号:   CN105280749-A
  • 发明人:   FENG S, SHI H, WEI D, WEI X, ZHOU D, SHEN Y
  • 专利权人:   CHINESE ACAD SCI CHONGQING GREEN INTEL
  • 国际专利分类:   H01L031/028, H01L031/101, H01L031/18
  • 专利详细信息:   CN105280749-A 27 Jan 2016 H01L-031/101 201617 Pages: 7 English
  • 申请详细信息:   CN105280749-A CN10825269 24 Nov 2015
  • 优先权号:   CN10825269

▎ 摘  要

NOVELTY - Agraphene-based thin-film photoelectric detector comprises silicon-silicon dioxide substrate, graphene light absorbing material, gold source and drain electrodes. USE - Graphene-based thin-film photoelectric detector for use in low light detection, ultrafast light pulse detection, optical communications and other fields for wavelengths in visible and far-infrared light. ADVANTAGE - The graphene-based thin-film photoelectric detector can be prepared in a simple and cost-effective manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a method for preparing a graphene-based thin-film photoelectric detector, which involves separately cleaning substrate with acetone, ethanol, deionized water and oxygen plasma, preparing graphene by utilizing micro-mechanical peeling method, utilizing sticky tape highly oriented pyrolytic graphite, folding for 3-4 times, separating and transferring to silicon wafer, heating in vacuum oven at 100 degrees C for 1-2 minutes, naturally cooling to room temperature, removing the plastic tape and covering graphene substrate, producing an electrode by covering substrate with positive resist S1805, designing the electrode structure, utilizing direct laser writing of the graphene afford electrode pattern and vapor deposition method of titanium metal thickness of 10-20 nm and gold thickness of 40-80 nm, washing photoresist excess metal with acetone to give a structure containing electrodes and graphene.