▎ 摘　　要

NOVELTY - The pressure sensor has a package housing (8). The underside of the substrate (6) and the package housing together define a detection space. The detection unit is arranged in the detection space. The detection unit comprises a boron nitride/graphene/boron nitride nano-film (1) and an electrode (22). The electrode is connected to the boron nitride/graphene/boron nitride nano-film. The detection space is an oxygen-free vacuum chamber capable of isolating the boron nitride/graphene/boron nitride nano-film from the outside air. USE - Graphene pressure sensor capable of stably operating at high temperature for pressure measurement. ADVANTAGE - The device can work stably in high temperature environment and has good repeatability, high reliability, acid and alkali resistance, corrosion resistance, can be applied to dynamic, static high temperature test environment, significantly enhancing the high temperature range. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the overall structure of a graphene pressure sensor. (Drawing includes non-english language text) Boron nitride/graphene/boron nitride nano-film (1) Interconnect bump (2) Substrate (6) Package housing (8) Electrode (22)