▎ 摘 要
NOVELTY - The utility model claims a vacuum graphene carbonizing furnace, comprising a furnace body, the furnace body is connected with the vacuum pumping pipe, the vacuum pipe through a three-way joint are respectively connected with air pipe connected with the vacuum pump and inert gas conveying pipe connected with the inert gas storage tank; the exhaust pipe is installed with a second electromagnetic valve, the exhaust pipe is further equipped with a gas flow rate detector for detecting a gas flow rate of the inert gas conveying pipe is provided with a first electromagnetic valve, the signal output end of the first electromagnetic valve and the second electromagnetic valve are connected with the controller; the signal input end of said gas flow rate detector is connected with the controller. The utility model claims multiple electromagnetic valves combined with inert gas protection, and it can effectively avoid blocking of the vacuum pump, the product is scrapped caused by accidental power failure or the like and safety risk.