▎ 摘　　要

NOVELTY - Production device for controllable layer number of graphene micro-nano structure, comprises laser control and focusing unit (1), temperature monitoring unit (2), laser spot monitoring unit (3), vacuum flow control unit (4), precise translation stage (5), air floating vibration isolation platform and computer. The laser control and focusing unit comprises laser which is orderly arranged with half wave plate, laser power meter and polarization light splitting sheet. The precise translation stage is connected with the computer used to prepare graphene micro-nano structure. USE - Production device for controllable layer number of graphene micro-nano structure (claimed). ADVANTAGE - The production device changes the manufacturing parameters, layer number of the graphene and size of the focusing spot. DETAILED DESCRIPTION - Production device comprises laser control and focusing unit (1), temperature monitoring unit (2), laser spot monitoring unit (3), vacuum and flow control unit (4), precise translation stage (5), air floating vibration isolation platform and computer. The laser control and focusing unit comprises laser which is orderly arranged with half wave plate, laser power meter and polarization light splitting sheet. The precise translation stage is connected with the computer used to prepare graphene micro-nano structure. The laser is divided into two paths which are respectively output to the beam sampler and beam collector. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of production device. Laser control and focusing unit (1) Temperature monitoring unit (2) Laser spot monitoring unit (3) Vacuum flow control unit (4) Precise translation stage (5)