• 专利标题:   Manufacture of non-catalytic graphene-grown substrate for electronic component, involves forming substrate, supplying gas containing carbon and etching gas, performing metal organic chemical vapor deposition and growing graphene.
  • 专利号:   KR2016003131-U
  • 发明人:   LEE Y T
  • 专利权人:   LEE Y T
  • 国际专利分类:   C01B031/04
  • 专利详细信息:   KR2016003131-U 19 Sep 2016 C01B-031/04 201672 Pages: 70
  • 申请详细信息:   KR2016003131-U KR005084 01 Sep 2016
  • 优先权号:   KR162977, KR005084

▎ 摘  要

NOVELTY - Manufacture of non-catalytic graphene-grown substrate involves forming a substrate free of catalyst layer at the surface, supplying a gas containing carbon and an etching gas, performing metal organic chemical vapor deposition, adsorbing hydrocarbon radicals, diffusing on the surface of nucleus by Van der Waals force, growing hetero-epitaxially, performing metal organic chemical vapor deposition constantly and growing graphene. USE - Manufacture of non-catalytic graphene-grown substrate for manufacturing electronic component (all claimed). DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) non-catalytic graphene-grown substrate; and (2) manufacturing device of non-catalytic graphene-grown substrate.