▎ 摘 要
NOVELTY - Manufacture of non-catalytic graphene-grown substrate involves forming a substrate free of catalyst layer at the surface, supplying a gas containing carbon and an etching gas, performing metal organic chemical vapor deposition, adsorbing hydrocarbon radicals, diffusing on the surface of nucleus by Van der Waals force, growing hetero-epitaxially, performing metal organic chemical vapor deposition constantly and growing graphene. USE - Manufacture of non-catalytic graphene-grown substrate for manufacturing electronic component (all claimed). DETAILED DESCRIPTION - INDEPENDENT CLAIMS are included for the following: (1) non-catalytic graphene-grown substrate; and (2) manufacturing device of non-catalytic graphene-grown substrate.