• 专利标题:   Providing air- and/or moisture-barrier coating on at least portion of two-dimensional material used in electronic device, by e.g. providing substrate having two-dimensional material on it, providing composition comprising inorganic oxide, fluoride or sulfide precursor and doping agent.
  • 专利号:   US2022093852-A1, GB2601104-A
  • 发明人:   GUINEY I, THOMAS S, TYLER M, GLASS H, WALLIS R
  • 专利权人:   PARAGRAF LTD, PARAGRAF LTD
  • 国际专利分类:   H01L021/02, H01L043/04, H01L043/06, H01L043/14, C23C018/12
  • 专利详细信息:   US2022093852-A1 24 Mar 2022 H01L-043/14 202233 English
  • 申请详细信息:   US2022093852-A1 US411225 25 Aug 2021
  • 优先权号:   GB014761

▎ 摘  要

NOVELTY - Providing an air- and/or moisture-barrier coating (215) on at least a portion of a two-dimensional material, comprises: (i) providing a substrate (200) having a two-dimensional material, on it; (ii) providing a composition comprising an inorganic oxide, fluoride or sulfide precursor and a doping agent; (iii) coating (210) the composition onto at least a portion of the two-dimensional material; and (iv) curing and/or annealing the coated two-dimensional material at a temperature of not greater than1200degrees Celsius to convert the inorganic oxide, fluoride or sulfide precursor into an inorganic oxide, fluoride or sulfide air- and/or moisture-barrier coating on at least a portion of the two-dimensional material, where the doping agent dopes the two-dimensional material. USE - The method is useful for providing an air- and/or moisture-barrier coating on at least a portion of a two-dimensional material which is used in an electronic device comprising a Hall sensor (all claimed). ADVANTAGE - The method: enables a simpler manufacturing process without having to ensure such a strict exclusion of contact with the atmosphere without substantially affecting the graphene properties due to the minimal exposure; provides improved by having a barrier coating that protects the graphene layer structure from the air and moisture present in the atmosphere; provides an improved approach for providing a doped two-dimensional material, preferably graphene; and is economical. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a doped two-dimensional material, obtainable by the method. DESCRIPTION OF DRAWING(S) - The figure shows the method for providing an air-and moisture-barrier coating on a graphene layer structure and shows cross-sections of the intermediate products and of the final coated graphene layer structure. Substrate (200) Graphene layer structure (205) Coating (210) Air- and moisture-barrier coating (215) Doped graphene layer structures (220)