• 专利标题:   Graphene-based nanoplasmonic waveguide for use in photodetector, has first electrode connected to graphene layer, and second electrode spaced apart from first electrode.
  • 专利号:   KR2023086262-A
  • 发明人:   KWON M S, LEE J W
  • 专利权人:   UNIST ULSAN NAT SCI TECHNOLOGY INST
  • 国际专利分类:   G02B006/12
  • 专利详细信息:   KR2023086262-A 15 Jun 2023 G02B-006/12 202352 Pages: 16
  • 申请详细信息:   KR2023086262-A KR174724 08 Dec 2021
  • 优先权号:   KR174724

▎ 摘  要

NOVELTY - The waveguide (110) has an insulator positioned on a surface of a silicon strip. A metal part is connected to the insulator, and another insulator is positioned on another surface of the silicon strip. An insulating layer (116) covers a portion of one surface of nano-plasmonic waveguide. A graphene layer covers the portion of the insulating layers, and a first electrode (117) is connected with the graphene layer. A second electrode (118) is spaced apart from the first electrode and connected to a graphene layer that emits hot electrons when absorbing light propagating through the waveguide, and is made of copper, gold, silver, indunetin oxide, aluminum and titanium nitride. USE - Graphene-based nanoplasmonic waveguide for use in a photodetector (claimed). ADVANTAGE - The nanoplasmonic waveguide has improved optical signal detection efficiency. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a photodetector. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the graphene-based nanoplasmonic waveguide. 100Optical detector 110Graphene-based nanoplasmonic waveguide 116Insulating layer 117First electrode 118Second electrode