• 专利标题:   Method for fabricating graphene nano-mesh in e.g. transparent display device, involves forming graphene nano-mesh including openings by etching oxide layer, and transferring graphene nano-mesh onto substrate after removing catalyst layer.
  • 专利号:   US2017069436-A1, US9595401-B1, KR2017028098-A
  • 发明人:   LEE J, KIM Y, LEE C, LEE J H, KIM Y S, LEE C S
  • 专利权人:   SAMSUNG ELECTRONICS CO LTD
  • 国际专利分类:   C23C016/26, C23C016/40, C23C016/455, C23C016/50, H01G011/36, H01G011/86, H01G013/00, H01G004/00, H01G005/00, H01G007/00, H01G009/00, C01B031/04, C01B033/12, C01F007/02, C01G023/047, C01G027/02, C01G009/02, H01G011/84
  • 专利详细信息:   US2017069436-A1 09 Mar 2017 H01G-011/86 201721 Pages: 12 English
  • 申请详细信息:   US2017069436-A1 US066780 10 Mar 2016
  • 优先权号:   KR124949

▎ 摘  要

NOVELTY - The method involves forming a graphene layer (320) on a catalyst layer through chemical vapor deposition. An oxide layer (330) is formed on a defect site of the graphene layer. A graphene nano-mesh including a set of openings is formed by etching the oxide layer. The graphene nano-mesh is transferred onto a substrate after removing the catalyst layer. A cover film is formed on the graphene nano-mesh after forming the graphene nano-mesh including the set of openings, where the chemical vapor deposition includes plasma enhanced chemical vapor deposition. USE - Method for fabricating a graphene nano-mesh in a transparent display device, an organic light-emitting device, and a solar battery. ADVANTAGE - The method enables improving electric characteristics of the graphene nano-mesh. The method enables reducing fabricating processes and time by avoiding an additional photolithography process. DETAILED DESCRIPTION - The substrate is a flexible transparent substrate. An INDEPENDENT CLAIM is also included for a method for fabricating an ultra-capacitor. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of an ultra-capacitor. Graphene layer (320) Oxide layer (330)