• 专利标题:   Method for manufacturing graphene field-effect transistor, involves forming graphene layer on surface of glass substrate, and forming high dielectric constant material layer on surface of graphene layer.
  • 专利号:   CN107230724-A, TW201734245-A, TW608116-B1
  • 发明人:   XIAO D
  • 专利权人:   ZING SEMICONDUCTOR CORP, ZING SEMICONDUCTOR CORP
  • 国际专利分类:   H01L021/285, H01L021/336, H01L029/16, H01L029/78, C23C016/02, C23C016/30, H01L029/786
  • 专利详细信息:   CN107230724-A 03 Oct 2017 H01L-029/78 201775 Pages: 9 Chinese
  • 申请详细信息:   CN107230724-A CN10173589 24 Mar 2016
  • 优先权号:   CN10173589

▎ 摘  要

NOVELTY - The method involves obtaining a dielectric constant range of a glass substrate. The glass substrate is heated about 600-1200 degrees centigrade. A graphene layer is formed on a surface of the glass substrate. A high dielectric constant material layer e.g. silicon nitride, silicon oxynitride, aluminum oxide, zirconium oxide, hafnium oxide, is formed on a surface of the graphene layer. Metal organic chemical vapor deposition is processed. A source electrode and a drain electrode are formed on the high dielectric constant material layer. USE - Method for manufacturing a graphene field-effect transistor (claimed). DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a graphene field-effect transistor. DESCRIPTION OF DRAWING(S) - The drawing shows a flow diagram illustrating a method for manufacturing a graphene field-effect transistor. '(Drawing includes non-English language text)'