• 专利标题:   Optical sensor has graphene layer, and enhancement layer which is provided above graphene layer and reinforces intensity of optical electric field by surface plasmon resonance.
  • 专利号:   JP2022185934-A
  • 发明人:   HAYASHI K
  • 专利权人:   FUJITSU LTD
  • 国际专利分类:   G01J001/02, H01L031/0232, H01L031/08, H01L031/10
  • 专利详细信息:   JP2022185934-A 15 Dec 2022 H01L-031/0232 202306 Pages: 23 Japanese
  • 申请详细信息:   JP2022185934-A JP093874 03 Jun 2021
  • 优先权号:   JP093874

▎ 摘  要

NOVELTY - The sensor (100) has a graphene layer (111), and an enhancement layer (120) that is provided above the graphene layer and is configured to enhance the intensity of the optical electric field by surface plasmon resonance. The enhancement layer comprises multiple transparent conductive films (121). The transparent conductive films are regularly arranged in a plane parallel to the surface of the graphene layer. USE - Optical sensor. ADVANTAGE - The sensitivity of the optical sensor is improved by increasing the amount of light absorption by the graphene layer. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing an optical sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a cross-sectional view of the optical sensor. (Drawing includes non-English language text) 100Optical sensor 111Graphene layer 120Enhancement layer 121Transparent conductive film 133Gate electrode