• 专利标题:   High-sensitivity photoelectric detector manufacturing method, involves matching silicon dioxide substrate with boron element, and forming carbon film between n-type silicon chip and top electrode and contacted with graphene.
  • 专利号:   CN108493287-A, CN108493287-B
  • 发明人:   ZHANG X, PENG D, DIAO D
  • 专利权人:   UNIV SHENZHEN
  • 国际专利分类:   H01L031/028, H01L031/102, H01L031/18
  • 专利详细信息:   CN108493287-A 04 Sep 2018 H01L-031/102 201863 Pages: 10 Chinese
  • 申请详细信息:   CN108493287-A CN10270741 29 Mar 2018
  • 优先权号:   CN10270741

▎ 摘  要

NOVELTY - The method involves forming an insulating layer on a surface of a n-type silicon chip. A bottom electrode is located on a lower surface of the n-type silicon chip. A top electrode is located on the insulation layer. A graphene is coated on a carbon film. The carbon film is covered on a silicon dioxide substrate. The silicon dioxide substrate is matched with a boron element by using a ECR plasma sputtering process. The carbon film is formed between the n-type silicon chip and the top electrode and contacted with the graphene. The insulating layer is made of silicon dioxide or insulating metal oxide materials. USE - High-sensitivity photoelectric detector manufacturing method. ADVANTAGE - The method enables increasing sensitive detection ability of weak light, reducing processing cost and simplifying photoelectric detector manufacturing steps. DESCRIPTION OF DRAWING(S) - The drawing shows a side view of a high-sensitivity photoelectric detector.