• 专利标题:   Graphene patterning method involves forming isolation layer on graphene layer and forming photo-etching glue layer on isolation layer.
  • 专利号:   CN104022017-A, US2015357239-A1, US9633899-B2, CN104022017-B
  • 发明人:   SHI Y, SHU S, XU C, SUN B, LV Z, ZHANG F, YU J, GU J
  • 专利权人:   BOE TECHNOLOGY GROUP CO LTD, SHU S, LV Z, GU J, SHI Y, ZHANG F, SUN B, XU C, BOE TECHNOLOGY GROUP CO LTD
  • 国际专利分类:   H01L021/02, H01L021/027, H01L021/3205, H01L021/768, H01L021/308, H01L023/498, H05K003/06
  • 专利详细信息:   CN104022017-A 03 Sep 2014 H01L-021/02 201479 Pages: 15 Chinese
  • 申请详细信息:   CN104022017-A CN10256945 10 Jun 2014
  • 优先权号:   CN10256945

▎ 摘  要

NOVELTY - The method involves forming (101) isolation layer on a graphene layer. The photo-etching glue layer is formed (102) on the isolation layer. The photo-etching glue layer is provided (103) for a patterning process according to the patterned photo-resist layer of isolation layer for etching process. The patterned isolation layer is formed (104). The graphene layer is formed (105). USE - Graphene patterning method. ADVANTAGE - The graphene patterning process is performed to avoid time existing technology in photo-resist material stripping the graphene thin film caused by falling or light-sensitive lacquer residue the graphene film layer of bad condition, and to increase the yield of the product in the condition of low production cost in efficient manner. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for manufacturing substrate. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating the graphene patterning process. (Drawing includes non-English language text) Step for forming isolation layer on graphene layer (101) Step for forming photo-etching glue layer on isolation layer (102) Step for providing photo-etching glue layer for patterning process (103) Step for forming patterned isolation layer (104) Step for forming graphene layer (105)