• 专利标题:   Solenoid injection system for use in manufacture of noncatalytic substrate growth graphene, has piezo injection system that performs gas injection by operating valve module and piston module by applying voltage.
  • 专利号:   KR2016059468-A
  • 发明人:   LEE Y T
  • 专利权人:   LEE Y T
  • 国际专利分类:   C01B031/04, F16K031/02
  • 专利详细信息:   KR2016059468-A 26 May 2016 C01B-031/04 201642 Pages: 59
  • 申请详细信息:   KR2016059468-A KR028221 09 Mar 2016
  • 优先权号:   KR160651, KR028221

▎ 摘  要

NOVELTY - The system has a gas blower that comprises a storage which is configured for storing the carbon-included gas (300). A heating portion is configured for heating the carbon-included gas with a constant temperature. A piezo injection system is configured for showing the carbon-included gas and performing the gas injection by operating a solenoid valve module and a piston module and opening of a needle in an order, by applying a voltage. USE - Solenoid injection system for use in manufacture of noncatalytic substrate growth graphene used in electronic component. ADVANTAGE - The catalyst metal on the substrate is not used for the manufacture of the noncatalytic substrate growth graphene. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view illustrating the process of manufacturing noncatalytic substrate growth graphene. Step for growing graphene on substrate (1) Step for supplying carbon-included gas (2) Board layer (100) Carbon-included gas (300) Graphene (500)