• 专利标题:   Graphene transistor has graphene film that is arranged on support substrate, where ohmic electrode is arranged on graphene film and intermediate layer is arranged between support substrate and graphene film.
  • 专利号:   JP2018014360-A
  • 发明人:   OKADA M, YONEMURA T, SUEMITSU M, FUKIDOME H, NAGASAWA H, TATENO Y
  • 专利权人:   SUMITOMO ELECTRIC IND LTD, UNIV TOHOKU
  • 国际专利分类:   H01L021/28, H01L021/336, H01L029/06, H01L029/417, H01L029/786, H01L051/05, H01L051/30
  • 专利详细信息:   JP2018014360-A 25 Jan 2018 H01L-029/786 201809 Pages: 15 Japanese
  • 申请详细信息:   JP2018014360-A JP141610 19 Jul 2016
  • 优先权号:   JP141610

▎ 摘  要

NOVELTY - The graphene transistor (1) comprises a support substrate (11) and a graphene film (13) that is arranged on the support substrate. An ohmic electrode (14) is arranged on the graphene film. The graphene film is provided with an uneven surface section (13w). The shape of the recessed unit in the uneven surface section of the graphene film is cone shape, column shape, polygon cone form, polygonal-prism shape and groove shape. The support substrate is a silicon carbide substrate. An intermediate layer is arranged between the support substrate and the graphene film. USE - Graphene transistor. ADVANTAGE - The graphene transistor comprises a support substrate and a graphene film that is arranged on the support substrate, and thus enables redcuing contact resistance of an ohmic electrode and a graphene film for facilitating development of the transistor using the graphene. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a manufacturing method for graphene transistor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic sectional view of a graphene transistor. Graphene transistor (1) Support substrate (11) Graphene film (13) Uneven surface section (13w) Ohmic electrode (14)