▎ 摘 要
NOVELTY - Manufacture of carbon nanotube array-graphene hybrid structure involves ultrasonically cleaning silicon wafers, blowing nitrogen gas, placing cleaned wafers in the middle of a quartz tube, which is placed in central heating zone of the furnace, placing a mixed solution of ferrocene and xylene near the inlet end of the quartz tube, supplying a carbon source and a catalyst, heating, blowing argon gas, maintaining at 750-950 degrees C, performing chemical vapor deposition method, increasing temperature, introducing hydrogen, heating mixed solution, and cooling to room temperature. USE - Manufacture of carbon nanotube array-graphene hybrid structure (claimed). ADVANTAGE - The carbon nanotube array-graphene hybrid structure is produced quickly and economically by simple method without separately growing carbon nanotube array.