• 专利标题:   Manufacture of carbon nanotube array-graphene hybrid structure involves cleaning silicon wafers, placing in quartz tube of furnace, placing mixed solution of ferrocene and xylene, supplying carbon source and catalyst, and heating.
  • 专利号:   CN106086811-A, CN106086811-B
  • 发明人:   WANG L, GUO S, FAN D
  • 专利权人:   UNIV NANCHANG, UNIV NANCHANG
  • 国际专利分类:   C23C016/26, C23C016/448
  • 专利详细信息:   CN106086811-A 09 Nov 2016 C23C-016/26 201707 Pages: 6 Chinese
  • 申请详细信息:   CN106086811-A CN10413708 14 Jun 2016
  • 优先权号:   CN10413708

▎ 摘  要

NOVELTY - Manufacture of carbon nanotube array-graphene hybrid structure involves ultrasonically cleaning silicon wafers, blowing nitrogen gas, placing cleaned wafers in the middle of a quartz tube, which is placed in central heating zone of the furnace, placing a mixed solution of ferrocene and xylene near the inlet end of the quartz tube, supplying a carbon source and a catalyst, heating, blowing argon gas, maintaining at 750-950 degrees C, performing chemical vapor deposition method, increasing temperature, introducing hydrogen, heating mixed solution, and cooling to room temperature. USE - Manufacture of carbon nanotube array-graphene hybrid structure (claimed). ADVANTAGE - The carbon nanotube array-graphene hybrid structure is produced quickly and economically by simple method without separately growing carbon nanotube array.