▎ 摘　　要

NOVELTY - The electrode has flexible substrate (4) which is provided with the silicon needle tip array structure (2). A graphene layer (3) is provided on one side of the flexible substrate on which the silicon needle tip array structure is provided, and an antenna base is provided on the other side. The copper foils are arranged on the surrounding edges of the flexible substrate, and the graphene layer) is electrically connected to the antenna base through the copper foil. A metal conductive layer (1) is sputtered on the silicon needle tips of the silicon needle tip array structure. The metal conductive layer is electrically connected to the graphene layer. USE - Flexible needle tip array dry electrode. ADVANTAGE - The flexible needle tip array dry electrode has good biological compatibility and electrical stimulation and excellent recording effect of detecting dry electrode. The flexible substrate has better adhesion and ductility, and is convenient to penetrate the scalp and convenient to operate. Through the metal conductive layer, graphene layer, copper foil and antenna base to realize electric signal collection and output, and does not adopt conductive gel does not have the original battery effect, impedance is relatively stable relative to the wet electrode, compared with the traditional dry electrode of the present invention. The method uses a primary corrosion to obtain silicon array, low cost and simple method, finally can according to the thickness of the silicon wafer, corrosion time adjusting needle tip height, and satisfies needed, very high flexibility, and uses graphene to optimize the conductive effect and comfort degree. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a preparation method of the flexible needle tip array dry electrode. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of flexible needle tip array dry electrode. 1Metal conductive layer 2Silicon needle tip array structure 3graphene layer 4Flexible substrate