• 专利标题:   Removing organic impurities from a graphene surface, comprises prepurifying graphene surface, supplying ozone containing gas to surface, and irradiating oxygen containing gas from surrounding air with UV-radiation for creating ozone.
  • 专利号:   DE102012201946-A1
  • 发明人:   FREIMANN R
  • 专利权人:   ZEISS SMT GMBH CARL
  • 国际专利分类:   C01B013/10, C01B031/04, G21K005/00
  • 专利详细信息:   DE102012201946-A1 14 Mar 2013 C01B-031/04 201321 Pages: 13 German
  • 申请详细信息:   DE102012201946-A1 DE10201946 09 Feb 2012
  • 优先权号:   DE10201946

▎ 摘  要

NOVELTY - The method comprises prepurifying a graphene surface (4a), supplying an ozone containing gas to the graphene surface to be cleaned for 100 minutes, irradiating an oxygen containing gas from surrounding air with UV-radiation for the creation of ozone so that the graphene surface is also irradiated with the UV-radiation. The UV-radiation has a wavelength of greater than 235 nm, and is produced by a medium pressure mercury vapor lamp. Before irradiation, UV-radiation has a wavelength of less than 235 nm. USE - The method is useful for removing organic impurities from a graphene surface (claimed). ADVANTAGE - The method ensures economic, effective and rapid removal of organic impurities from the graphene surface with high safety. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for an equipment for removing organic impurities from a graphene surface. DESCRIPTION OF DRAWING(S) - The figure shows a schematic view of an equipment for removing organic impurities from a graphene surface. Cleaning chamber (2) Graphene layer (4) Graphene surface (4a) Gas supply device (6) Inlet. (7)