• 专利标题:   Roll-to-roll graphene film growth device comprises vacuum chamber, vacuum pump, valve which is provided between vacuum chamber and vacuum pump, where vacuum chamber includes gallium pool which is provided at bottom of vacuum chamber.
  • 专利号:   CN110983302-A, CN211645381-U
  • 发明人:   BAI X, WANG W, LIU Z
  • 专利权人:   NINGBO ROUTAN ELECTRONIC TECHNOLOGY CO
  • 国际专利分类:   C23C016/26, C23C016/54
  • 专利详细信息:   CN110983302-A 10 Apr 2020 C23C-016/54 202038 Pages: 10 Chinese
  • 申请详细信息:   CN110983302-A CN11395209 30 Dec 2019
  • 优先权号:   CN11395209, CN22454004

▎ 摘  要

NOVELTY - Roll-to-roll graphene film growth device comprises vacuum chamber (1), vacuum pump. The valve is provided between the vacuum chamber and vacuum pump (10). The vacuum chamber includes gallium pool (5) which is provided at the bottom of the vacuum chamber. The gallium pool carries liquid gallium. The air intake pipe (2) is used for venting into gallium pool. The transmission equipment comprises unwinding roll, turning roll and winding roll which is arranged in sequence. The plastic film (7) is installed on the unwinding roller (6), after turned by the turning roller, wound on the winding roller (8). The steering roller (3) is immersed in liquid gallium (4). USE - Roll-to-roll graphene film growth device. ADVANTAGE - The roll-to-roll graphene film growth device has simple growing method and low cost. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for performing roll-to-roll graphene film growth, which involves using equipment, heating gallium pool, opening air inlet pipe, introducing methane, starting transmission equipment to make plastic film pass through liquid gallium and grow graphene, and winding on the winding roller to obtain the graphene film on the surface of the plastic film. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of roll-to-roll graphene film growth device. Vacuum chamber (1) Air intake pipe (2) Steering roller (3) Liquid gallium (4) Gallium pool (5) Unwinding roller (6) Plastic film (7) Winding roller (8) Vacuum pump (10)