• 专利标题:   Preparing single crystal graphene film comprises e.g. providing substrate, carbon source and container, providing at least one through hole on container, placing substrate in container, and depositing carbon source.
  • 专利号:   CN112921396-A
  • 发明人:   ZOU D, TIAN Z, ZHANG Z, ZHAO Y, YU D
  • 专利权人:   UNIV SOUTHERN SCI TECHNOLOGY
  • 国际专利分类:   C30B025/16, C30B025/18, C30B029/02
  • 专利详细信息:   CN112921396-A 08 Jun 2021 C30B-025/18 202164 Pages: 13 Chinese
  • 申请详细信息:   CN112921396-A CN10102828 26 Jan 2021
  • 优先权号:   CN10102828

▎ 摘  要

NOVELTY - Preparing single crystal graphene film comprises providing substrate, carbon source and container, providing at least one through hole on the container, placing substrate in the container, and depositing the carbon source at least on the surface of the substrate through a chemical vapor deposition reaction to obtain single crystal graphene film. USE - The method is useful for preparing single crystal graphene film. ADVANTAGE - The method: isolates various impurities e.g. quartz slag and dust particles during the chemical vapor deposition reaction on the outside of the container, so as to avoid the above-mentioned impurities from causing impurity pollution to the obtained single crystal graphene film; improves the surface cleanliness and preparation efficiency of the obtained single crystal graphene film; obtains large-size single crystal graphene film, so that the obtained single crystal graphene film has more excellent performance; is simple in operation; does not require complicated and diverse surface pretreatments on the substrate; and realizes the industrialized preparation of the single crystal graphene film.