• 专利标题:   Graphene/nanomaterials coated silicon/germanium thermopile flow sensor for measuring flow rate of gases, has thermopile sensors having main portion that is configured for temperature measurement, voltage and current generation.
  • 专利号:   IN202041040729-A
  • 发明人:   DEIVASAGAYAM D
  • 专利权人:   VELLORE INST TECHNOLOGY
  • 国际专利分类:   H05K003/46
  • 专利详细信息:   IN202041040729-A 02 Oct 2020 H05K-003/46 202000 Pages: 8 English
  • 申请详细信息:   IN202041040729-A IN41040729 21 Sep 2020
  • 优先权号:   IN41040729

▎ 摘  要

NOVELTY - The sensors has supporting substrates that are provided underneath of sensor and made up of rigid or flexible materials or combinations. The main portion of thermopile sensors are configured for temperature measurement, voltage and current generation. The voltage from thermopile sensors is measured by digital multimeter through either wired or wireless connections. The thermopile structure comprises the materials selected from the group including nitrogen-silicon (n-Si) or nickel-germanium (ni-Ge) or phosphorus silicon (p-Si) or p-Ge. USE - Graphene/nanomaterials coated silicon/germanium thermopile flow sensor for measuring flow rate of gases and fluids in open or-closed geometry/channels. ADVANTAGE - A simplified fabrication sequence of thermopile sensor on rigid and flexile substrates is realized, such that the sensors realizes high sensitivity to flow velocity of nitrogen gas and temperature, and high reliability. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic block diagram of a new thermopile sensor connected to digital multimeter.