• 专利标题:   Preparation method useful for vertical transistor in information technology, involves transferring graphene film to substrate, patterning film graphene film on substrate and connecting two-dimensional oxide layer and substrate to obtain vertical transistor.
  • 专利号:   CN115472504-A
  • 发明人:   HAN S, ZHOU K, ZHOU Y
  • 专利权人:   UNIV SHENZHEN
  • 国际专利分类:   H01L021/336, H01L029/06, H01L029/10, H01L029/41, H01L029/43, H01L029/78
  • 专利详细信息:   CN115472504-A 13 Dec 2022 H01L-021/336 202204 Chinese
  • 申请详细信息:   CN115472504-A CN11154989 21 Sep 2022
  • 优先权号:   CN11154989

▎ 摘  要

NOVELTY - Preparing vertical transistor comprises transferring a graphene film to a substrate, and patterning the film graphene film on the substrate, where the substrate includes a silicon substrate gate electrode and a gate dielectric layer arranged on the gate electrode of the silicon substrate, preparing a two-dimensional oxide layer on the graphene film, and preparing a metal electrode on the film of the graphene, and connecting the two-dimensional oxide layer and the substrate to obtain the vertical transistor, where the two-dimensional oxides layer includes a single-layer two-dimensional oxides with different doping proportions or a multi-layer three-dimensional oxide with a hetero-structure. USE - The method is useful for preparing vertical transistor e.g. thermal ion vertical transistor with semiconductor channel and tunneling vertical transistor in information technology. ADVANTAGE - The vertical transistor uses the two-dimensional oxide layer as the channel layer to control the doped metal proportion, and improve the stability of the two-dimensional oxide layer to efficiently control the vertical transistor channel carrier property for achieving higher on-state current and switch ratio. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a vertical transistor. DESCRIPTION OF DRAWING(S) - The drawing shows a flowchart illustrating the method for preparing vertical transistor in information technology (Drawing includes non-English language text).