▎ 摘 要
NOVELTY - Nanochemical sensor comprises a silicon dioxide/silicon double layer; a film layer applied on the silicon dioxide/silicon double layer; a bio-layer coated on the film layer; and an electrode formed on one surface of the silicon dioxide/silicon double layer and/or the film layer. The electrode is formed as a source electrode and a drain electrode on the film layer. The source electrode is formed on the film layer, and is formed as a gate electrode under the double layer. The bio-layer comprises biomaterial, and has thickness of 0.3-30 nm. USE - The nanochemical sensor is useful for detecting capacitance change (claimed). ADVANTAGE - The nanochemical sensor improves selectivity for various chemical substances according to repetitive structure of specific nucleotide sequence when final decomposition ability is excellent, has excellent decomposition capability due to thin thickness of coating layer, and detects changes in capacitance.