▎ 摘　　要

NOVELTY - Self-powered flexible sensor comprises a first flexible film layer sequentially provided with first flexible electrode layer, a zinc oxide nano-layer, a second flexible film sheet, a third flexible electrode sheet and a fourth flexible membrane layer. The first and second flexible electrode layers are respectively led out with a lead for collecting and deriving an electric signal of the sensor. The first, the second and the third flexible electrodes are a carbon nano-tube electrode layer, a graphene electrode layer or a carbon powder electrode layer. The first flexible film layer, the second flexible film layer and the third flexible film layer are polydimethyl siloxane prepolymer films. USE - Self-powered flexible sensor e.g. electrochemical sensor used in flexible mechanical robot e.g. software robot. Can also be used in polyethylene glycol terephthalate (PET), polypropylene naphthalate (PEN), polyether sulfone (PES), Kapton film or paper as sensor of substrate. ADVANTAGE - The self-powered flexible sensor has excellent flexibility and tensile restorability, chemical component is stable, sensing monitoring performance is excellent, and by introducing metal ion as a dopant changes the micro appearance of the zinc oxide material to enhance the piezoelectric performance of the material, strengthening the force electric response sensitive performance, and can well match the requirement of the soft robot to the mechanical property and monitoring performance. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is also included for a preparation method of the self-powered flexible sensor. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic representation of the self-powered flexible sensor structure.