• 专利标题:   Electrode connection structure of graphene film, has electrode peeling prevention layer that incorporates with conductive property for preventing cover portion of contact electrode and peels contact electrode peeled from graphene layer.
  • 专利号:   JP2014086592-A, JP6052730-B2
  • 发明人:   OKIKAWA Y, YAMADA T, HASEGAWA M
  • 专利权人:   DOKURITSU GYOSEI HOJIN SANGYO GIJUTSU SO
  • 国际专利分类:   C23C028/00, H01L021/28
  • 专利详细信息:   JP2014086592-A 12 May 2014 H01L-021/28 201434 Pages: 11 Japanese
  • 申请详细信息:   JP2014086592-A JP234901 24 Oct 2012
  • 优先权号:   JP234901

▎ 摘  要

NOVELTY - The electrode connection structure has an insulating film (102) that is provided on substrate (101). A graphene film (103) is provided on the insulating film. A contact electrode (104) is provided on the graphene film. An electrode peeling prevention layer (105) is incorporated with conductive property for preventing cover portion of contact electrode and contact electrode is peeled from graphene layer. A taking-out electrode (106) is provided on electrode peeling prevention layer. The electrode peeling prevention layer is provided to cover contact electrodes. USE - Electrode connection structure of graphene film. ADVANTAGE - Since electrode peeling prevention layer is incorporated with conductive property for preventing cover portion of a contact electrode and a contact electrode is peeled from a graphene layer and taking-out electrode is provided on electrode peeling prevention layer, peeling of the electrode linked to the graphene film utilized for electronic device. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic sectional view of the electrode peeling prevention layer on the contact electrode of thin film. (Drawing includes non-English language text) Substrate (101) Insulating film (102) Graphene film (103) Contact electrode (104) Electrode peeling prevention layer (105) Taking-out electrode (106)