• 专利标题:   Transparent electric conduction thin film based graphene patterning method involves introducing working gas, and covering mask by transparent conducting layer to complete patterning process of transparent electric conduction thin film.
  • 专利号:   CN104945014-A
  • 发明人:   CHEN X
  • 专利权人:   SUZHOU HANNANO MATERIAL TECHNOLOGY CO
  • 国际专利分类:   C04B041/53
  • 专利详细信息:   CN104945014-A 30 Sep 2015 C04B-041/53 201602 Pages: 9 Chinese
  • 申请详细信息:   CN104945014-A CN10114926 26 Mar 2014
  • 优先权号:   CN10114926

▎ 摘  要

NOVELTY - The method involves providing transparent electric conduction film. The selected substrate surface is covered on the transparent conducting layer (1) which is formed of graphene. The transparent electric conduction thin film is etched into indoor. The working gas is introduced, and the mask (3) is covered by transparent conducting layer to complete the patterning process of the transparent electric conduction thin film. USE - Transparent electric conduction thin film based graphene patterning method. ADVANTAGE - The cost of the transparent electric conduction thin film is reduced, and the efficiency of the transparent electric conduction thin film is improved. The electrical property and stability of the transparent electric conduction thin film are excellent. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the transparent electric conduction thin film. Transparent conducting layer (1) Transparent substrate (2) Mask (3)