1. 平台首页
  2. 国际专利信息
  • 专利标题:   MEMS acoustic transducer, has dielectric spacer arranged on back plate unit between adjacent conductive perforated back plate portions, and graphene membranes supported by dielectric spacer and extended over perforated back plate portions.
  • 专利号:   DE102014204712-A1, KR2014113546-A, US2014270271-A1, CN104053100-A, KR1566103-B1, US9516428-B2, CN104053100-B
  • 发明人:   DEHE A, RUHL G, DEU A, RUHR G
  • 专利权人:   INFINEON TECHNOLOGIES AG, INFINEON TECHNOLOGIES AG, DEHE A, RUHL G
  • 国际专利分类:   B81B003/00, B81B007/02, B81B007/04, B81C001/00, H04R007/02, H04R019/00, H04R019/04, H04R031/00, H04R023/00, H04R009/06, H04R007/04
  • 专利详细信息:   DE102014204712-A1 18 Sep 2014 B81B-007/02 201463 Pages: 40 German
  • 申请详细信息:   DE102014204712-A1 DE10204712 13 Mar 2014
  • 优先权号:   US830111

▎ 摘　　要

NOVELTY - The transducer has a substrate formed with a cavity (104). A conductive back plate unit is provided with multiple adjacent conductive perforated back plate portions, which are extended over the cavity. A dielectric spacer is arranged on the back plate unit between the adjacent conductive perforated back plate portions. Multiple graphene membranes (120) are supported by the dielectric spacer and extended over the conductive perforated back plate portions. The back plate unit comprises an array structure that is provided with adjacent cells. USE - MEMS acoustic transducer. ADVANTAGE - The dielectric spacer is arranged on the back plate unit between the adjacent conductive perforated back plate portions, and the graphene membranes are supported by the dielectric spacer and extended over the conductive perforated back plate portions, thus avoiding corrosion caused in the cavity in an effective manner. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for the following: (1) a MEMS microphone (2) a MEMS microspeaker (3) a speaker array (4) a method for manufacturing an acoustic transducer. DESCRIPTION OF DRAWING(S) - The drawing shows a sectional view of a microphone comprising graphene membranes on top. Microphone (100) Substrate (102) Cavity (104) Back plate (114) Graphene membranes (120)