• 专利标题:   Apparatus for producing transition metal dichalcogenide (TMD) transistor arrays of electronic device, has single-layer transition metal dichalcogenide formed only on substrate and lateral edges of monolayer graphene film.
  • 专利号:   WO2017218488-A1, US2019165107-A1
  • 发明人:   PARK J, GAO H, GUIMARAES M H D, RALPH D C, KANG K, XIE S
  • 专利权人:   UNIV CORNELL, UNIV CORNELL
  • 国际专利分类:   C23C014/22, C23C016/44, H01L021/02, H01L021/67, H01L029/16, H01L051/00, C23C016/30, H01L029/423
  • 专利详细信息:   WO2017218488-A1 21 Dec 2017 C23C-014/22 201804 Pages: 43 English
  • 申请详细信息:   WO2017218488-A1 WOUS037179 13 Jun 2017
  • 优先权号:   US349193P, US16309637

▎ 摘  要

NOVELTY - The apparatus has a monolayer graphene film that is arranged on a portion of the substrate. A single-layer transition metal dichalcogenide (TMD) is formed only on the substrate and lateral edges of the monolayer graphene film. The substrate is made of aluminum (III) oxide, silicon dioxide, or silicon. The single-layer TMD is made of molybdenum disulfide, tungsten disulfide, molybdenum diselenide, tungsten diselenide, molybdenum telluride, tungsten ditelluride, niobium selenide or a combination. USE - Apparatus for producing transition metal dichalcogenide (TMD) transistor arrays of optically-transparent electronic device (claimed). ADVANTAGE - The full potential of atomically-thin TMD materials for electronics is ensured. The intrinsic volume and contact resistances are enhanced. The chemically and thermally stable is improved. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for a method for producing transition metal dichalcogenide (TMD) transistor arrays. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view of the TMD materials.