• 专利标题:   Synthesis apparatus of graphene sheet used in e.g. solar cell, has first sensor unit for measuring current which varies in fixed interval, after separating carrier film from graphene thin film and after applying high frequency voltage.
  • 专利号:   KR2015093051-A, KR1933586-B1
  • 发明人:   PARK C H, YOON J H
  • 专利权人:   HANWHA TECHWIN CO LTD, HANWHA AEROSPACE CO LTD
  • 国际专利分类:   B01J019/08, C01B031/02
  • 专利详细信息:   KR2015093051-A 17 Aug 2015 B01J-019/08 201565 Pages: 8
  • 申请详细信息:   KR2015093051-A KR013828 06 Feb 2014
  • 优先权号:   KR013828

▎ 摘  要

NOVELTY - The apparatus (100) has first transferring roller (120) that is installed at first pressing roller (131) contacting with carrier film (3), and is provided for transferring target substrate (1). A first deposit roller (110) is provided for attaching carrier film on graphene thin film (2) formed on target substrate. A first sensor unit (140) is installed facing first transferring roller, for measuring current which varies in fixed interval, after separating carrier film from graphene thin film and after applying high frequency voltage. USE - Synthesis apparatus of graphene sheet used in display device, electric component, photoelectric device, battery and solar cell. ADVANTAGE - Since the surface resistance of the graphene thin film is measured precisely, by providing first sensor unit for measuring current which varies in fixed interval, after separating carrier film from graphene thin film and after applying high frequency voltage, the damage of the graphene thin film surface is prevented effectively. DESCRIPTION OF DRAWING(S) - The drawing shows a conceptual diagram of the graphene sheet synthesis apparatus. Target substrate (1) Graphene thin film (2) Carrier film (3) Graphene synthesis apparatus (100) First deposit roller (110) First transferring roller (120) First pressing roller (131) First sensor unit (140)