• 专利标题:   Growth method of graphene used for semiconductor element, involves performing chemical vapor deposition of graphene, forming metal catalyst crystal thin film, and exposing portion of surface of upper portion of crystal substrate.
  • 专利号:   JP2013091587-A
  • 发明人:   NOZAWA K
  • 专利权人:   PANASONIC CORP
  • 国际专利分类:   C01B031/02
  • 专利详细信息:   JP2013091587-A 16 May 2013 C01B-031/02 201335 Pages: 6 Japanese
  • 申请详细信息:   JP2013091587-A JP235774 27 Oct 2011
  • 优先权号:   JP235774

▎ 摘  要

NOVELTY - Growth method of graphene (203) involves performing chemical vapor deposition of graphene using gas containing hydrocarbon with respect to crystal substrate, forming metal catalyst crystal thin film (102), and exposing a portion of surface of the upper portion of the crystal substrate which has insulation. USE - Growth method of graphene used for semiconductor element for electronic devices e.g. direct transistor. ADVANTAGE - The method transversely enables graphene having high carrier movement, and does not require metal removal and transfer. DESCRIPTION OF DRAWING(S) - The drawing shows a schematic view explaining the growth of the graphene. Insulating crystallinity insulated substrate (101) Metal catalyst crystal thin film (102) Graphene (203)