▎ 摘　　要

NOVELTY - The sensor has a signal pad (14) electrically connected to a conductive signal connection pad of a thin film squid chip (12) through a metal connection line (13) and a double coating layer containing polydimethylsiloxane (PDMS). A detection coil is electrically directly connected to the conductive coil connection pad through a superconducting connection line. The double coating layers are formed along an outer surface of the sensor. The sensor is made of carbon black, graphene, carbon nanotube, PDMS-polyethylene glycol (PEG) block copolymer and PDMS, where thickness of layers of the sensor is less than 10 micrometers. USE - Superconducting quantum interference device (Squid) sensor for use in a multi-channel squid sensor-based biofeedback measurement system. ADVANTAGE - The sensor adopts electrostatic discharge resistance function, and obtains hydrophobic characteristics of the coating layer, and improves gas permeability, and easily removes air bubbles generated in the manufacturing process of forming coating layer in everyday conditions, and quickly identifies defects generated during coating process or heat treatment with naked eye due to transparent nature of polydimethylsiloxane (PDMS), and minimizes volume change due to thermal expansion caused by coating layer. DETAILED DESCRIPTION - An independent claim is also included for a superconducting quantum interference device sensor manufacturing method. DESCRIPTION OF DRAWING(S) - The drawing shows a front view of a superconducting quantum interference device sensor. 11Printed circuit board 12Chin film squid chip 13Metal connection line 14Signal pad