• 专利标题:   Transferring graphene to plexiglass substrate by growing single layer of graphene on metal foil, placing between carriers, flattening, spin-coating layer of photoresist, etching, drying, developing, rinsing with water, and drying.
  • 专利号:   CN111620330-A
  • 发明人:   ZHANG G, LIU Y, ZHAO Y, WEI X, YU W, SUN J, ZHANG Y
  • 专利权人:   UNIV XIAN JIAOTONG
  • 国际专利分类:   C01B032/186, C01B032/194
  • 专利详细信息:   CN111620330-A 04 Sep 2020 C01B-032/194 202078 Pages: 7 Chinese
  • 申请详细信息:   CN111620330-A CN10438315 21 May 2020
  • 优先权号:   CN10438315

▎ 摘  要

NOVELTY - Transferring graphene to plexiglass substrate comprises growing single layer of graphene on metal foil; placing graphene/metal foil between two smooth and flat carriers, and flattening metal foil; spin-coating layer of photoresist on surface of graphene for curing; preparing etching solution for metal foil, placing photoresist/graphene/metal foil in etching solution to etch metal foil, and contacting metal foil and etching with liquid under buoyancy of photoresist; etching metal foil, and using poly-methyl methacrylate (PMMA) target substrate to get photoresist/graphene; releasing photoresist/graphene into deionized water for rinsing, placing photoresist/graphene/PMMA target substrate on experimental table and blow drying; putting photoresist/graphene/PMMA target substrate on hot plate for drying; performing UV exposure on the photoresist on surface of photoresist/graphene/PMMA target substrate; and using developer to develop, rinsing with deionized water, and drying. USE - The method is used for transferring graphene to plexiglass substrate. ADVANTAGE - The method has high success rate, and does not leave photoresist impurities.