• 专利标题:   Nano-diamond-graphene composite film is prepared by mixing diamond powder and glycerin to obtain diamond powder grinding paste, and then polishing obtained diamond powder grinding paste to single crystal silicon wafer.
  • 专利号:   CN111058011-A
  • 发明人:   HU X, JIANG M, CHEN C, LI X
  • 专利权人:   UNIV ZHEJIANG TECHNOLOGY
  • 国际专利分类:   C23C016/02, C23C016/27, G01N027/30, G01N027/416
  • 专利详细信息:   CN111058011-A 24 Apr 2020 C23C-016/27 202041 Pages: 14 Chinese
  • 申请详细信息:   CN111058011-A CN11352707 25 Dec 2019
  • 优先权号:   CN11352707

▎ 摘  要

NOVELTY - Nano-diamond-graphene composite film is prepared by mixing diamond powder and glycerin to obtain a diamond powder grinding paste, polishing the obtained diamond powder grinding paste to single crystal silicon wafer, and then cleaning the silicon wafer to complete the seeding process. The single crystal silicon substrate is placed into hot wire chemical vapor deposition equipment by using acetone as carbon source, where hydrogen bubbling is used to bring the acetone into the reaction chamber for film growth. USE - Nano-diamond-graphene composite film. ADVANTAGE - The nano-diamond-graphene composite film has a very low background current and a very wide potential window, which is expected to be used in extreme field of trace detection electrodes in the environment.