• 专利标题:   Switchable array comprises microstructure of interconnected units formed of graphene tubes with open spaces in microstructure bounded by graphene tubes, junction gate field-effect transistor gate in graphene tubes and control line.
  • 专利号:   US2020203483-A1, US10748999-B2
  • 发明人:   COOK B S, COLOMBO L, DADVAND N, VENUGOPAL A
  • 专利权人:   TEXAS INSTR INC
  • 国际专利分类:   C01B032/16, C01B032/184, C01B032/194, H01L029/15, H01L029/16, H01L029/423, H01L029/808, H01L029/66
  • 专利详细信息:   US2020203483-A1 25 Jun 2020 H01L-029/15 202055 Pages: 20 English
  • 申请详细信息:   US2020203483-A1 US229827 21 Dec 2018
  • 优先权号:   US229827

▎ 摘  要

NOVELTY - Switchable array comprises: a microstructure of interconnected units formed of graphene (100) tubes with open spaces in the microstructure bounded by the graphene tubes; at least one junction gate field-effect transistor (JFET) gate (130) in at least one of the graphene tubes; and a control line having an end connected to the JFET gate, where the control line extending to at a periphery of the microstructure. USE - Used as switchable array. DETAILED DESCRIPTION - INDEPENDENT CLAIMS are also included for: (1) forming a switchable array graphene microstructure, comprising photo-initiating polymerization of a monomer in a pattern of connected interconnected units to form a polymer micro-lattice, removing unpolymerized monomer, coating the polymer micro-lattice with a metal, removing the polymer micro-lattice to leave a metal micro-lattice, forming graphene on the metal micro-lattice, removing the metal micro-lattice to leave a graphene micro-lattice, photo-initiating polymerization of a monomer around connections (126) in the graphene micro-lattice, removing unpolymerized monomer to leave a micro-lattice having portions of exposed graphene and portions of graphene surrounded by polymer, coating the portions of exposed graphene with dielectric and metal, selectively removing plating resist to leave gates in the micro-lattice, removing the polymer surrounding the connections in the graphene micro-lattice, photo-initiating polymerization of a monomer in columns extending from a gate through at least one opening in the micro-lattice to a periphery of the micro-lattice and plating the columns with an electrically conductive metal to form gate control lines; and (2) a switchable array graphene microstructure prepared by a process comprising photo-initiating polymerization of a monomer in a pattern of connected interconnected units to form a polymer micro-lattice, removing unpolymerized monomer, coating the polymer micro-lattice with a metal, removing the polymer micro-lattice to leave a metal micro-lattice, forming graphene on the metal micro-lattice, removing the metal micro-lattice to leave a graphene micro-lattice, photo-initiating polymerization of a monomer around connections in the graphene micro-lattice, removing unpolymerized monomer to leave a micro-lattice having portions of exposed graphene and portions of graphene surrounded by polymer, coating the portions of exposed graphene with dielectric and metal, selectively removing plating resist to leave gates in the micro-lattice, removing the polymer surrounding the connections in the graphene micro-lattice, photo-initiating polymerization of a monomer in columns extending from a gate through at least one opening in the micro-lattice to a periphery of the micro-lattice and plating the columns with an electrically conductive metal to form gate control lines. DESCRIPTION OF DRAWING(S) - The figure shows various angles of a 3D schematic representation of a graphene or graphene/polymer micro-lattice with connectors to gates on various horizontal lattice members. Graphene (100) Interconnected lattice members (102) Connection (126) Opening in lattice (128) Gate (130)