▎ 摘　　要

NOVELTY - A deep-UV LED hetero-epitaxial substrate comprises a composite substrate composed of nanosheets having a surface diameter of 5-1000 nm, uniformly and physically coated on the surface of a sapphire substrate. The melting point of the nanosheets is higher than the growth temperature of the epitaxial material. USE - Deep-UV LED hetero-epitaxial substrate. ADVANTAGE - The epitaxial substrate has improved crystal quality and improved dislocation density at the surface. DETAILED DESCRIPTION - An INDEPENDENT CLAIM is included for the preparation of the deep UV LED hetero-epitaxial substrate.